ECR Atom Source
Low-pressure operation ECR type atom source
It generates an atom flux from ECR-excited plasma. This atom source, based on the ECR method, has excellent low-pressure operating characteristics. This filamentless structure of the atom source can produce atom flux from gas species such as nitrogen, hydrogen, and oxygen.
- 企業：アドキャップバキュームテクノロジー
- 価格：Other
